The Effects of Deposition Pressure on the Optical and Structural Properties of d.c. PECVD Hydrogenated Amorphous Carbon Films
Awang, Rozidawati; Tong, Goh Boon; Ab. Gani, Siti Meriam; Ritikos, Richard; Abdul Rahman, Saadah
- 期刊名称Materials Science Forum
- 作者Awang, Rozidawati; Tong, Goh Boon; Ab. Gani, Siti Meriam; Ritikos, Richard; Abdul Rahman, Saadah
- 卷第517卷
- 电子ISSN1662-9752
- 文件大小300.33KB
- 发表时间2006
- DOI10.4028/www.scientific.net/MSF.517.81
- 页码81-84