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Some properties of TiN films produced in hollow cathode and microwave ECR hybrid plasma system

Some properties of TiN films produced in hollow cathode and microwave ECR hybrid plasma system

L-E. Gustavsson; H. Baránková; L. Bárdos

作者L-E. Gustavsson; H. Baránková; L. Bárdos
卷第201卷
印刷ISSN0257-8972
文件大小869.49KB
发表时间2006
DOI10.1016/j.surfcoat.2006.02.019
页码1464-1468

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