Impact of Annealing Temperature Ramps on the Electrical Activation of N+ and P+ Co-Implanted SiC Layers
Blanqué, Servane; Pérez, R.; Mestres, Narcis; Contreras, Sylvie; Camassel, Jean; Godignon, Phillippe
- 期刊名称Materials Science Forum
- 作者Blanqué, Servane; Pérez, R.; Mestres, Narcis; Contreras, Sylvie; Camassel, Jean; Godignon, Phillippe
- 电子ISSN1662-9752
- 文件大小208.08KB
- 发表时间2006
- DOI10.4028/www.scientific.net/MSF.527-529.795
- 页码795-798