Plasma ignition in a grounded chamber connected to a capacitive discharge
Lieberman, M A; Lichtenberg, A J; Kim, Sungjin; Gudmundsson, J T; Keil, D L; Kim, Jisoo
- 期刊名称Plasma Sources Science and Technology
- 作者Lieberman, M A; Lichtenberg, A J; Kim, Sungjin; Gudmundsson, J T; Keil, D L; Kim, Jisoo
- 卷第15卷
- 期第2期
- 印刷ISSN0963-0252
- 电子ISSN1361-6595
- 文件大小424.64KB
- 发表时间2006-05-01
- DOI10.1088/0963-0252/15/2/013
- 页码276-287