Gas pressure effects on thickness uniformity and circumvented deposition during sputter deposition process
- 作者Takeo Nakano; Shigeru Baba
- 卷第80卷
- 期第7期
- 印刷ISSN0042-207X
- 文件大小194.58KB
- 发表时间2006
- DOI10.1016/j.vacuum.2005.11.005
- 页码647-649
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