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Proposals for producing novel periodic structures on silicon by ion bombardment sputtering

Proposals for producing novel periodic structures on silicon by ion bombardment sputtering

G. Carter

作者G. Carter
卷第81卷
期第1期
印刷ISSN0042-207X
文件大小106.64KB
发表时间2006
DOI10.1016/j.vacuum.2006.02.015
页码138-140

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