Characterization of ultralow-energy implants and towards the analysis of three-dimensional dopant distributions using three-dimensional atom-probe tomography
K. Thompson; J. H. Bunton; T. F. Kelly; D. J. Larson
- 作者K. Thompson; J. H. Bunton; T. F. Kelly; D. J. Larson
- 文件大小2696.18KB
- 发表时间2006
- DOI10.1116/1.2141621