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Buried electrode electroacoustic technology for the fabrication of thin film based resonant components

Buried electrode electroacoustic technology for the fabrication of thin film based resonant components

D. M. Martin; V. Yantchev; I. Katardjiev

作者D. M. Martin; V. Yantchev; I. Katardjiev
文件大小590.63KB
发表时间2006
DOI10.1088/0960-1317/16/9/016

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