SPIE Proceedings [SPIE Smart Materials, Nano- and Micro-Smart Systems - Adelaide, Australia (Sunday 10 December 2006)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III - MEMS microshutter arrays for James Webb Space Telescope
Li, Mary J.; Chiao, Jung-Chih; Dzurak, Andrew S.; Adachi, Tomoko; Allen, Christine; Jagadish, Chennupati; Thiel, David V.; Babu, Sachi; Bajikar, Sateesh; Beamesderfer, Michael; Bradley, Ruth; Denis, Kevin; Costen, Nick; Ewin, Audrey; Franz, David; Hess, Larry; Hu, Ron; Jackson, Kamili; Jhabvala, Murzy; Kelly, Dan; King, Todd; Kletetschka, Gunther; Kutyrev, Alexander; Lynch, Barney; Miller, Timothy; Moseley, Jr., Harvey; Mikula, Vilem; Mott, Brent; Oh, Lance; Pontius, James; Rapchun, David; Ray, Chris; Schulte, Eric; Schwinger, Scott; Shu, Peter; Silverberg, Robert; Smith, Wayne; Snodgrass, Steve; Sohl, David; Sparr, Leroy; Steptoe-Jackson, Rosalind; Veronica, Valeriano; Wang, Liqin; Zheng, Yun; Zincke, Chris
- 作者Li, Mary J.; Chiao, Jung-Chih; Dzurak, Andrew S.; Adachi, Tomoko; Allen, Christine; Jagadish, Chennupati; Thiel, David V.; Babu, Sachi; Bajikar, Sateesh; Beamesderfer, Michael; Bradley, Ruth; Denis, Kevin; Costen, Nick; Ewin, Audrey; Franz, David; Hess, Larry; Hu, Ron; Jackson, Kamili; Jhabvala, Murzy; Kelly, Dan; King, Todd; Kletetschka, Gunther; Kutyrev, Alexander; Lynch, Barney; Miller, Timothy; Moseley, Jr., Harvey; Mikula, Vilem; Mott, Brent; Oh, Lance; Pontius, James; Rapchun, David; Ray, Chris; Schulte, Eric; Schwinger, Scott; Shu, Peter; Silverberg, Robert; Smith, Wayne; Snodgrass, Steve; Sohl, David; Sparr, Leroy; Steptoe-Jackson, Rosalind; Veronica, Valeriano; Wang, Liqin; Zheng, Yun; Zincke, Chris
- 卷第6415卷
- 印刷ISSN0277-786X
- 文件大小3300.19KB
- 发表时间2006
- DOI10.1117/12.706308