SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator
Hassanpour, Pezhman; Tanner, Danelle M.; Ramesham, Rajeshuni; Cleghorn, William L.; Esmailzadeh, Ebrahim; Mills, James K.
- 作者Hassanpour, Pezhman; Tanner, Danelle M.; Ramesham, Rajeshuni; Cleghorn, William L.; Esmailzadeh, Ebrahim; Mills, James K.
- 卷第6111卷
- 印刷ISSN0277-786X
- 文件大小228.28KB
- 发表时间2006
- DOI10.1117/12.645309