SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 21 January 2006)] Photon Processing in Microelectronics and Photonics V - Production excimer drilling process for producing micron exit holes in polyimide
Okada, Tatsuo; Lizotte, Todd; Ohar, Orest; Arnold, Craig B.; Meunier, Michel; Holmes, Andrew S.; Geohegan, David B.; Träger, Frank; Dubowski, Jan J.
- 作者Okada, Tatsuo; Lizotte, Todd; Ohar, Orest; Arnold, Craig B.; Meunier, Michel; Holmes, Andrew S.; Geohegan, David B.; Träger, Frank; Dubowski, Jan J.
- 卷第6106卷
- 印刷ISSN0277-786X
- 文件大小565.57KB
- 发表时间2006
- DOI10.1117/12.654971