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Fine Surface Processing of LiNbO<sub>3</sub> Crystal Etched without Mask Using Fluorine System Gas Plasma RIE

Fine Surface Processing of LiNbO₃ Crystal Etched without Mask Using Fluorine System Gas Plasma RIE

Fujii, Takahiro; Omata, Teruaki; Yoshikado, Shinzo

期刊名称IEEJ Transactions on Fundamentals and Materials
作者Fujii, Takahiro; Omata, Teruaki; Yoshikado, Shinzo
卷第126卷
期第8期
印刷ISSN0385-4205
电子ISSN1347-5533
文件大小2122.00KB
发表时间2006
DOI10.1541/ieejfms.126.830
页码830-836

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