Manufacturable MEMS miniSEMs
- 作者R. Saini; Z. Jandric; J. Gammell; S.A.M. Mentink; D. Tuggle
- 卷第83卷
- 印刷ISSN0167-9317
- 文件大小228.83KB
- 发表时间2006
- DOI10.1016/j.mee.2006.01.260
- 页码1376-1381
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