Formation of Germanium Nanocrystals Embedded in a Silicon-Oxygen-Nitride Layer
Tu, Chun-Hao; Chang, Ting-Chang; Liu, Po-Tsun; Weng, Chi-Feng; Liu, Hsin-Chou; Chang, Li-Ting; Lee, Sheng-Kai; Chen, Wei-Ren; Sze, Simon M.; Chang, Chun-Yen
- 期刊名称Journal of The Electrochemical Society
- 作者Tu, Chun-Hao; Chang, Ting-Chang; Liu, Po-Tsun; Weng, Chi-Feng; Liu, Hsin-Chou; Chang, Li-Ting; Lee, Sheng-Kai; Chen, Wei-Ren; Sze, Simon M.; Chang, Chun-Yen
- 卷第154卷
- 期第6期
- 印刷ISSN0013-4651
- 文件大小656.19KB
- 发表时间2007
- DOI10.1149/1.2717494