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Nanoenergetic Materials for MEMS: A Review

Rossi, Carole; Zhang, Kaili; Esteve, Daniel; Alphonse, Pierre; Tailhades, Philippe; Vahlas, Constantin

期刊名称Journal of Microelectromechanical Systems
作者Rossi, Carole; Zhang, Kaili; Esteve, Daniel; Alphonse, Pierre; Tailhades, Philippe; Vahlas, Constantin
卷第16卷
期第4期
印刷ISSN1057-7157
文件大小973.09KB
发表时间2007-08
DOI10.1109/JMEMS.2007.893519
页码919-931