[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - A Differential Capacitive Three-Axis SOI Accelerometer using Vertical Comb Electrodes
- 作者Hamaguchi, H.; Sugano, K.; Tsuchiya, T.; Tabata, O.
- 文件大小1000.62KB
- 发表时间2007
- DOI10.1109/SENSOR.2007.4300425
- 页码1483-1486
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