A new model for squeeze-film damping of electrically actuated microbeams under the effect of a static deflection

• 期刊名称Journal of Micromechanics and Microengineering
• 作者Li, Pu; Hu, Rufu; Fang, Yuming
• 卷第17卷
• 期第7期
• 印刷ISSN0960-1317
• 电子ISSN1361-6439
• 文件大小304.33KB
• 发表时间2007-07-01
• DOI10.1088/0960-1317/17/7/005
• 页码1242-1251