[IEEE 2007 International Conference on Mechatronics and Automation - Harbin, China (2007.08.5-2007.08.8)] 2007 International Conference on Mechatronics and Automation - System Requirement Analysis of Laser Interference Nanolithography
- 作者Wang, Zuobin; Zhang, Jin; Peng, Changsi; Tan, Chunlei; Ayerdi, Isabel; Rodriguez, Ainara; Verevkin, Yury K.; Berthou, Thierry; Tisserand, Stephane; Olaizola, Santiago M.
- 文件大小447.23KB
- 发表时间2007
- DOI10.1109/icma.2007.4303582
- 页码434-439
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