[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Thermal Stability of Pt and C-Doped NiSi Films
Machkaoutsan, V.; Pages, X.; Bauer, M.; Thomas, S.; Mertens, S.; Verheyden, K.; Vanormelingen, K.; Granneman, E.
- 作者Machkaoutsan, V.; Pages, X.; Bauer, M.; Thomas, S.; Mertens, S.; Verheyden, K.; Vanormelingen, K.; Granneman, E.
- 文件大小1087.67KB
- 发表时间2007
- DOI10.1109/rtp.2007.4383834
- 页码145-149