[IEEE 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual - Phoenix, AZ, USA (2007.04.15-2007.04.19)] 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual - Influence of Hydrogen Permeability of Liner Nitride Film on Program/Erase Endurance of Split-Gate Type Flash EEPROMS
- 作者Liu, Ziyuan; Fujieda, Shinji; Hayashi, Fumihiko; Shimizu, Masakuni; Nakata, Masashi; Ishigaki, Hirokazu; Wilde, Markus; Fukutani, Katsuyuki
- 文件大小607.25KB
- 发表时间2007
- DOI10.1109/relphy.2007.369891
- 页码190-196
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