Improved thermal stability of ruthenium oxide metal gate electrode on hafnium oxide gate dielectric

• 期刊名称Applied Physics Letters
• 作者Hasan, Musarrat; Park, Hokyung; Lee, Joon-myong; Hwang, Hyunsang
• 卷第91卷
• 期第3期
• 印刷ISSN0003-6951
• 文件大小443.80KB
• 发表时间2007
• DOI10.1063/1.2766654