Dielectric Films for Advanced Microelectronics || Integration of Low-k Dielectric Films in Damascene Processes
- 作者Baklanov, Mikhail R.; Green, Martin L.; Maex, Karen
- 文件大小4873.01KB
- 发表时间2007
- DOI10.1002/9780470017944.ch5
- 页码199-250
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