[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Analysis of Valveless Piezoelectric Micropump using Electrical Equivalent Circuit Model
Tanaka, S.; Ichihashi, O.; Sugano, K.; Tsuchiya, T.; Tabata, O.
- 作者Tanaka, S.; Ichihashi, O.; Sugano, K.; Tsuchiya, T.; Tabata, O.
- 文件大小429.86KB
- 发表时间2007
- DOI10.1109/sensor.2007.4300600
- 页码2183-2186