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Geometrical characterization of micro-holes drilled in glass by gravity-feed with spark assisted chemical engraving (SACE)

Geometrical characterization of micro-holes drilled in glass by gravity-feed with spark assisted chemical engraving (SACE)

Maillard, P; Despont, B; Bleuler, H; Wüthrich, R

期刊名称Journal of Micromechanics and Microengineering
作者Maillard, P; Despont, B; Bleuler, H; Wüthrich, R
卷第17卷
期第7期
印刷ISSN0960-1317
电子ISSN1361-6439
文件大小487.62KB
发表时间2007-07-01
DOI10.1088/0960-1317/17/7/017
页码1343-1349

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