Computational Solid Mechanics Modeling of Asperity Deformation and Pad-Wafer Contact in CMP
- 期刊名称MRS Proceedings
- 作者Jiang, Bo; Muldowney, Gregory P.
- 卷第991卷
- 电子ISSN1946-4274
- 文件大小2276.68KB
- 发表时间2007-1
- DOI10.1557/PROC-0991-C01-05
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