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Surface morphology of Mn+ implanted Ge(1 0 0): A systematic investigation as a function of the implantation substrate temperature

Surface morphology of Mn+ implanted Ge(1 0 0): A systematic investigation as a function of the implantation substrate temperature

L. Ottaviano; A. Verna; V. Grossi; P. Parisse; S. Piperno; M. Passacantando; G. Impellizzeri; F. Priolo
  • 作者L. Ottaviano; A. Verna; V. Grossi; P. Parisse; S. Piperno; M. Passacantando; G. Impellizzeri; F. Priolo
  • 卷第601卷
  • 期第13期
  • 印刷ISSN0039-6028
  • 文件大小961.36KB
  • 发表时间2007
  • DOI10.1016/j.susc.2006.11.075
  • 页码2623-2627
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