A moving-coil designed micro-mechanics tester with application on MEMS
- 期刊名称Measurement Science and Technology
- 作者Huan, Yong; Zhang, Taihua; Yang, Yemin
- 卷第18卷
- 期第11期
- 印刷ISSN0957-0233
- 电子ISSN1361-6501
- 文件大小557.74KB
- 发表时间2007-11-01
- DOI10.1088/0957-0233/18/11/046
- 页码3612-3616
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