Study of La-Induced Flat Band Voltage Shift in Metal/HfLaO
x
/SiO
2
/Si Capacitors
Yamamoto, Yoshiki; Kita, Koji; Kyuno, Kentaro; Toriumi, Akira
- 期刊名称Japanese Journal of Applied Physics
- 作者Yamamoto, Yoshiki; Kita, Koji; Kyuno, Kentaro; Toriumi, Akira
- 卷第46卷
- 期第11期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小185.99KB
- 发表时间2007-11-6
- DOI10.1143/JJAP.46.7251
- 页码7251-7255