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Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing (RTP)

Volha A. Matylitskaya; Oliver Brunkahl; Gerald Kothleitner; Wolfgang Bock; Bernd O. Kolbesen

作者Volha A. Matylitskaya; Oliver Brunkahl; Gerald Kothleitner; Wolfgang Bock; Bernd O. Kolbesen
卷第4卷
期第6期
印刷ISSN1610-1634
电子ISSN1610-1642
文件大小1054.94KB
发表时间2007
DOI10.1002/pssc.200675231
页码1802-1816