Dielectric Films for Advanced Microelectronics || Electrical Characterization of Advanced Gate Dielectrics
Baklanov, Mikhail R.; Green, Martin L.; Maex, Karen
- 作者Baklanov, Mikhail R.; Green, Martin L.; Maex, Karen
- 文件大小3196.88KB
- 发表时间2007
- DOI10.1002/9780470017944.ch9
- 页码371-435