Hard plasma chemical coatings based on silicon carbon nitride
- 作者L. A. Ivashchenko; V. I. Ivashchenko; O. K. Porada; S. M. Dub; P. L. Skrinskii; M. V. Ushakov; M. V. Karpets; A. I. Stegnii; L. A. Grishnova
- 卷第46卷
- 印刷ISSN1068-1302
- 电子ISSN1573-9066
- 文件大小307.48KB
- 发表时间2007-11
- DOI10.1007/s11106-007-0084-7
- 页码543-549
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