Preparation and characterization of transparent conductive ZnO:Ga films by DC reactive magnetron sputtering

• 作者Quan-Bao Ma; Zhi-Zhen Ye; Hai-Ping He; Jing-Rui Wang; Li-Ping Zhu; Bing-Hui Zhao
• 卷第59卷
• 期第2期
• 印刷ISSN1044-5803
• 文件大小691.30KB
• 发表时间2008
• DOI10.1016/j.matchar.2006.11.020
• 页码124-128