High diffusion length silicon germanium alloy thin films deposited by pulsed rf PECVD method
Partha Chaudhuri; Ayana Bhaduri; Atul Bandyopadhyay; Stephane Vignoli; Partha Pratim Ray; Christophe Longeaud
- 作者Partha Chaudhuri; Ayana Bhaduri; Atul Bandyopadhyay; Stephane Vignoli; Partha Pratim Ray; Christophe Longeaud
- 卷第354卷
- 印刷ISSN0022-3093
- 文件大小390.73KB
- 发表时间2008
- DOI10.1016/j.jnoncrysol.2007.09.077