Experimental evidence for the flatband voltage shift of high-k metal-oxide-semiconductor devices due to the dipole formation at the high-kâSiO[sub 2] interface
Iwamoto, Kunihiko; Kamimuta, Yuuichi; Ogawa, Arito; Watanabe, Yukimune; Migita, Shinji; Mizubayashi, Wataru; Morita, Yukinori; Takahashi, Masashi; Ota, Hiroyuki; Nabatame, Toshihide; Toriumi, Akira
- 期刊名称Applied Physics Letters
- 作者Iwamoto, Kunihiko; Kamimuta, Yuuichi; Ogawa, Arito; Watanabe, Yukimune; Migita, Shinji; Mizubayashi, Wataru; Morita, Yukinori; Takahashi, Masashi; Ota, Hiroyuki; Nabatame, Toshihide; Toriumi, Akira
- 卷第92卷
- 期第13期
- 印刷ISSN0003-6951
- 文件大小329.08KB
- 发表时间2008
- DOI10.1063/1.2904650