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Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry

Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry

Ohlídal, Ivan; Nečas, David; Buršíková, Vilma; Franta, Daniel; Ohlídal, Miloslav
  • 期刊名称Diamond and Related Materials
  • 作者Ohlídal, Ivan; Nečas, David; Buršíková, Vilma; Franta, Daniel; Ohlídal, Miloslav
  • 卷第17卷
  • 印刷ISSN0925-9635
  • 文件大小234.65KB
  • 发表时间2008-4
  • DOI10.1016/j.diamond.2007.10.024
  • 页码709-712
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