Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry
Ohlídal, Ivan; Nečas, David; Buršíková, Vilma; Franta, Daniel; Ohlídal, Miloslav
- 期刊名称Diamond and Related Materials
- 作者Ohlídal, Ivan; Nečas, David; Buršíková, Vilma; Franta, Daniel; Ohlídal, Miloslav
- 卷第17卷
- 印刷ISSN0925-9635
- 文件大小234.65KB
- 发表时间2008-4
- DOI10.1016/j.diamond.2007.10.024
- 页码709-712