Fluorine incorporated amorphous carbon thin films prepared by Surface Wave Microwave Plasma CVD

Kalita, Golap; Aryal, Hare Ram; Adhikari, Sudip; Ghimire, Dilip C.; Afre, Rakesh A.; Soga, Tetsuo; Sharon, Maheshwar; Umeno, Masayoshi

期刊名称Diamond and Related Materials
作者Kalita, Golap; Aryal, Hare Ram; Adhikari, Sudip; Ghimire, Dilip C.; Afre, Rakesh A.; Soga, Tetsuo; Sharon, Maheshwar; Umeno, Masayoshi
卷第17卷
印刷ISSN0925-9635
文件大小515.19KB
发表时间2008-7
DOI10.1016/j.diamond.2008.02.002
页码1697-1701

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