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Dependence of N2 pressure on the crystal structure and surface quality of AlN thin films deposited via pulsed laser deposition technique at room temperature

Dependence of N2 pressure on the crystal structure and surface quality of AlN thin films deposited via pulsed laser deposition technique at room temperature

Gaurav Shukla; Alika Khare

作者Gaurav Shukla; Alika Khare
卷第255卷
印刷ISSN0169-4332
文件大小1116.08KB
发表时间2008
DOI10.1016/j.apsusc.2008.06.190
页码2057-2062

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