Effect of SrTiO3 seed layer deposition time and thickness on low-temperature crystallization and electrical properties of Pb(Zr, Ti)O3 films by metalorganic chemical vapor deposition
Ji-Won Moon; Naoki Wakiya; Keisuke Fujito; Naohiko Iimori; Takanori Kiguchi; Tomohiko Yoshioka; Junzo Tanaka; Kazuo Shinozaki
- 作者Ji-Won Moon; Naoki Wakiya; Keisuke Fujito; Naohiko Iimori; Takanori Kiguchi; Tomohiko Yoshioka; Junzo Tanaka; Kazuo Shinozaki
- 卷第148卷
- 印刷ISSN0921-5107
- 文件大小490.87KB
- 发表时间2008
- DOI10.1016/j.mseb.2007.09.051
- 页码22-25