[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure
- 作者Yuta Yoshihata, ; Nguyen Binh-Khiem, ; Atsushi Takei, ; Eiji Iwase, ; Kiyoshi Matsumoto, ; Isao Shimoyama,
- 文件大小1436.76KB
- 发表时间2008
- DOI10.1109/memsys.2008.4443770
- 页码770-773
[IEEE 2013 IEEE Conference Anthology - China (2013.01.1-2013.01.8)] IEEE Conference Anthology - [Title page]2013
[IEEE 2013 IEEE Conference Anthology - China (2013.1.1-2013.1.8)] IEEE Conference Anthology - [Copyright notice]2013
[IEEE 2013 IEEE Conference Anthology - China (2013.1.1-2013.1.8)] IEEE Conference Anthology - Table of contents2013
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