The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition
Wang, Qi; Wang, Chengbing; Wang, Zhou; Zhang, Junyan; He, Deyan
- 期刊名称Applied Physics Letters
- 作者Wang, Qi; Wang, Chengbing; Wang, Zhou; Zhang, Junyan; He, Deyan
- 卷第93卷
- 期第13期
- 印刷ISSN0003-6951
- 文件大小524.68KB
- 发表时间2008
- DOI10.1063/1.2996273