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Morphological evolution of SiGe films covered with and without native oxide during vacuum thermal annealing

Morphological evolution of SiGe films covered with and without native oxide during vacuum thermal annealing

Zhang, Yong; Liao, Linghong; LI, Cheng; Lai, Hongkai; Chen, Songyan; Kang, J. Y.
  • 期刊名称Journal of Applied Physics
  • 作者Zhang, Yong; Liao, Linghong; LI, Cheng; Lai, Hongkai; Chen, Songyan; Kang, J. Y.
  • 卷第104卷
  • 期第9期
  • 印刷ISSN0021-8979
  • 文件大小597.68KB
  • 发表时间2008
  • DOI10.1063/1.3010301
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