Morphological evolution of SiGe films covered with and without native oxide during vacuum thermal annealing
Zhang, Yong; Liao, Linghong; LI, Cheng; Lai, Hongkai; Chen, Songyan; Kang, J. Y.
- 期刊名称Journal of Applied Physics
- 作者Zhang, Yong; Liao, Linghong; LI, Cheng; Lai, Hongkai; Chen, Songyan; Kang, J. Y.
- 卷第104卷
- 期第9期
- 印刷ISSN0021-8979
- 文件大小597.68KB
- 发表时间2008
- DOI10.1063/1.3010301