[IEEE 2008 IEEE Sensors - Lecce, Italy (2008.10.26-2008.10.29)] 2008 IEEE Sensors - Capacitive micromachined ultrasonic transducer as a chemical sensor

• 作者Kwan Kyu Park, ; Lee, Hyunjoo J.; Kupnik, Mario; Oralkan, Omer; Khuri-Yakub, Butrus T.
• 文件大小1603.53KB
• 发表时间2008
• DOI10.1109/icsens.2008.4716369
• 页码5-8