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Dynamic prediction of point defects in Czochralski silicon growth. An attempt to reconcile experimental defect diffusion coefficients with the criterion

Dynamic prediction of point defects in Czochralski silicon growth. An attempt to reconcile experimental defect diffusion coefficients with the criterion

N. Van Goethem; A. de Potter; N. Van den Bogaert; F. Dupret

作者N. Van Goethem; A. de Potter; N. Van den Bogaert; F. Dupret
卷第69卷
印刷ISSN0022-3697
文件大小465.12KB
发表时间2008
DOI10.1016/j.jpcs.2007.07.129
页码320-324

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