[ECS 23rd Symposium on Microelectronics Technology and Devices - Gramado, Brazil (September 1 - September 4, 2008)] ECS Transactions - Thermal Oxide Passivation by Corona Charges
- 作者Ramos, Carlos Alberto S.; Sánchez, Manuel C.; Onmori, Roberto K.; Stem, Nair
- 卷第14卷
- 文件大小416.14KB
- 发表时间2008
- DOI10.1149/1.2956071
- 页码539-543
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