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Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity

Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity

Didar, Tohid Fatanat; Dolatabadi, Ali; Wüthrich, Rolf

期刊名称Journal of Micromechanics and Microengineering
作者Didar, Tohid Fatanat; Dolatabadi, Ali; Wüthrich, Rolf
卷第18卷
期第6期
印刷ISSN0960-1317
电子ISSN1361-6439
文件大小440.50KB
发表时间2008-06-01
DOI10.1088/0960-1317/18/6/065016

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