Determining substrate temperature in an AC inverted cylindrical magnetron sputtering PVD system
- 作者A.N. Cloud; A. Aryasomayajula; D.G. Bhat; M.H. Gordon
- 卷第202卷
- 期第8期
- 印刷ISSN0257-8972
- 文件大小276.72KB
- 发表时间2008
- DOI10.1016/j.surfcoat.2007.07.007
- 页码1564-1567
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