发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

TiAlN film preparation by Y-shape filtered-arc-deposition system

Takayuki Mashiki; Hiroki Hikosaka; Hideto Tanoue; Hirofumi Takikawa; Yushi Hasegawa; Makoto Taki; Masao Kumagai; Masao Kamiya

作者Takayuki Mashiki; Hiroki Hikosaka; Hideto Tanoue; Hirofumi Takikawa; Yushi Hasegawa; Makoto Taki; Masao Kumagai; Masao Kamiya
卷第516卷
期第19期
印刷ISSN0040-6090
文件大小738.17KB
发表时间2008
DOI10.1016/j.tsf.2007.11.097
页码6650-6654