Pulsed ion-beam assisted deposition of Ge nanocrystals on SiO2 for non-volatile memory device

N.P. Stepina; A.V. Dvurechenskii; V.A. Armbrister; V.V. Kirienko; P.L. Novikov; V.G. Kesler; A.K. Gutakovskii; Z.V. Smagina; E.V. Spesivtzev

作者N.P. Stepina; A.V. Dvurechenskii; V.A. Armbrister; V.V. Kirienko; P.L. Novikov; V.G. Kesler; A.K. Gutakovskii; Z.V. Smagina; E.V. Spesivtzev
卷第517卷
期第1期
印刷ISSN0040-6090
文件大小448.91KB
发表时间2008
DOI10.1016/j.tsf.2008.08.160
页码313-316

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