Quantitative Evaluation of Gettering Efficiencies Below 1×10[sup 12] Atoms∕cm[sup 3] in p-Type Silicon Using a [sup 65]Cu Tracer
- 期刊名称Journal of The Electrochemical Society
- 作者Kim, Kwang-Salk; Lee, Sung-Wook; Kang, Hee-Bok; Lee, Bo-Young; Park, Su-Moon
- 卷第155卷
- 期第11期
- 印刷ISSN0013-4651
- 文件大小493.00KB
- 发表时间2008
- DOI10.1149/1.2977724
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