KrF Excimer Laser Ablation of Al
2
O
3
and Al
2
O
3
–TiC Ceramics
Iida, Yusuke; Tanaka, Hirokazu; Sugimoto, Hiroshi; Kanno, Yoshinori
- 期刊名称Japanese Journal of Applied Physics
- 作者Iida, Yusuke; Tanaka, Hirokazu; Sugimoto, Hiroshi; Kanno, Yoshinori
- 卷第47卷
- 期第2期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小203.92KB
- 发表时间2008-2-15
- DOI10.1143/JJAP.47.1068
- 页码1068-1070